Compotech Asia and China Integrated Circuit | Reno Interviews on Gas Flow Control Trends

Compotech Asia and China Integrated Circuit | Reno Interviews on Gas Flow Control Trends

Two of Asia’s top technical publications recently interviewed Reno’s Bill Suber on the latest trends in gas flow control technologies for semiconductor fabrication. He explained why the current thermal-based and pressure-based mass flow controller systems are unable to provide the low-flow operational performance required in the latest technology nodes and device geometries, and how those problems are being solved.

 

Read Compotech Asia’s article here, in Traditional Chinese: http://www.compotechasia.com/a/xin_/2017/0420/35196.html

 

For the China Integrated Circuits interview in Simplified Chinese, visit: http://www.cicmag.com/bbx/93858-93891.html?id=7301&newsid=1604069

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