At SEMICON Taiwan 2016 Reno Sub-Systems’ team met with editor Vega Chiu from Taiwan-based Semiconductor publication CTimes.
We discussed the current challenges and roadblocks in the industry and how current RF matching networks have been built on 1940s vacuum variable capacitor (VVC) technology, which was originally patented by Nikola Tesla in 1896. While slight enhancements have been made to the technology in that 120 years, its many moving parts have an analog limitation today of matching in 1-3+ seconds. The variation within that 1-3+ seconds also creates issues for process engineers, especially at leading-edge plasma processing.
Reno’s solid state Electronically Variable Capacitor™ (EVC™) matching network is a digital array that switches capacitance in 10 µsec and offers auto-tune matching in less than 500 µsec. This run-to-run repeatable and accurate Instantaneous Match™ technology enables the precise, high aspect ratio, selectively anisotropic sharp-edge plasma processing required of today’s and tomorrow’s devices, including 3D structures.
You can read the full article in traditional Chinese here: http://www.ctimes.com.tw/renos-evc-matching-network-improves-vvc-performance