The mass flow controller (MFC) footprint has limited current suppliers to an inlet and outlet fitting over a standard length to the detriment of performance. Current MFC-based gas systems are limited in their performance capabilities in precise low flows, switching, settling times, flow range capabilities, and sensitivity to pressure changes.
Reno Sub-Systems FlowNode™ is built around proprietary, patented technology solving each of these performance challenges.
Tell us what flow you need and our FastGas™ FlowNode™ technology will deliver it with a <100 msec response time.
Existing thermal-based and pressure-based MFCs are truly limited by physics to a minimum full-scale flow. Thermal MFCs require 1-5 sccm flows at a minimum from their flow sensor, and pressure-based MFCs require a restrictor sized for 100 sccm to avoid long shut-off times. Reno offers a 1 sccm full-scale Low FlowNode™ technology that is 100 times more stable and repeatable than either of the technologies.
Reno’s patent pending ALD/ALE Flow Node™ technology allows <100 msec gas switching without the spikes created with current valve switching.
Reno’s unique Wide-Range FlowNode™ technology features two or more measuring sections in a single device. This allows us to achieve 1% Reading (R) accuracy over separate 20:1 ranges to offer a 400-to-1, 1% accuracy range and a >4,000-to-1 control range.