Electronically Variable Capacitor™ (EVC™) Technology in Reno’s Matching Networks
Current RF matching networks have been built on 1940s vacuum variable capacitor (VVC) technology, which was originally patented by Nikola Tesla in 1896. While slight enhancements have been made to the technology in that 120 years, its many moving parts have an analog limitation today of matching in 1-3+ seconds. The variation within that 1-3+ seconds also creates issues for process engineers, especially at leading-edge plasma processing.