Reno’s new Precis™ Generator platform was announced in the run up to the leading US SEMI tradeshow, SEMICON West. The news was covered in the SEMICON West Show Daily, follow the link below then click through to page 14 to read its coverage.
Reno Sub-Systems, a producer of high-performance radio frequency (RF) matching networks, RF power generators and gas flow management systems for semiconductor manufacturing, announced from SEMICON West the latest addition to its Precis™ Solid-State Generator portfolio. Capable of 1.6kW microwave output at 2.45GHz, the new Precis generator offers the highestpower solid-state microwave generator available for semiconductor plasma applications. The company’s approach to power generation fills a growing need for advanced subsystem technologies to keep the industry on pace with Moore’s law.