Velocity™ EVC™ Matching Networks
Reno’s patented Electronically Variable Capacitor (EVC™) matching network provides an all-solid state, highly reliable and repeatable matching solution with sub-500 microsecond tune times every wafer every time.
Precis™ RF Power Generators
Reno’s patented Precis™ solid-state RF power generators deliver accurate and stable power delivery, fast pulsing for shorter process steps, and a compact design for space savings.
The GenMatch™ Series integrates Reno’s proven solid-state Electronic Variable Capacitor (EVC™) RF match and Precis™ generator technologies into a single unit to meet performance and space requirements at the most advanced nodes.