Products

Reno Sub-Systems > Products
Reno Sub-Systems > Products

Velocity EVC Matching Networks

Reno’s patented Electronically Variable Capacitor (EVC™) matching network provides an all-solid state, highly reliable and repeatable matching solution with sub-500 microsecond tune times every wafer every time.

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Precis™ RF Power Generators

Reno’s patented Precis™ solid-state RF power generators deliver accurate and stable power delivery, fast pulsing for shorter process steps, and a compact design for space savings.

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GenMatch™ Series

The GenMatch™ Series integrates Reno’s proven solid-state Electronic Variable Capacitor (EVC™) RF match and Precis™ generator technologies into a single unit to meet performance and space requirements at the most advanced nodes.

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