The GenMatch™ Series integrates Reno’s proven solid-state Electronic Variable Capacitor (EVC™) RF matching network and Precis™ generator technologies into a single, compact unit. GenMatch™ systems are ideal for leading-edge etch and deposition applications in semiconductor manufacturing, where level-to-level pulsing and short RF on-times are critical to meet performance requirements at the most advanced nodes.
GenMatch™ systems have a reduced footprint, saving space on the process tool, and are faster, more repeatable and more reliable. GenMatch™ also has lower cost of ownership and higher performance than separate units. GenMatch™ supports level-to-level pulsing, and the RF matching network matches impedance on each pulse, meaning every wafer sees the same frequency, unlike frequency sweep. AI and machine learning using the matching network’s extensive sensor and sampling capability further enhance system performance.
Power Levels: 500W to 10kW
Frequencies: 400kHz to 60MHz